MicroFab

Microfabrication Facility of the

Electronic Materials and Processing ResearchLaboratory

The Pennsylvania State University

University Park, PA 16802

    The purpose of the MicroFab facility is toprovide semiconductor processing and characterization tools to serve academicresearch, graduate education, and undergraduate education at Penn State,and to provide selected semiconductor processing and characterization capabilityto users from outside the University.
    The MicroFab is located in a Class 1000 cleanroom(the lithography room is Class 100) on the first floor of the ElectricalEngineering West building at Penn State's University Park campus.
Howto find the MicroFab on campus.
Howto find Penn State.

MicroFabResearch Projects	MicroFabLab Layout and Equipment Photos
Main Faculty Usersof the MicroFab	EMPRL Staff
MicroFabUser policies and fees	EE418Laboratory Course

EMPRL

PennState College of Engineering

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MainFaculty Users of the MicroFab

OsamaO. Awadelkarim	EngineeringScience and Mechanics
GaryL. Catchen	NuclearEngineering
StephenJ. Fonash	EngineeringScience and Mechanics
ThomasN. Jackson	Electrical Engineering
TheresaS. Mayer	Electrical Engineering
DavidL. Miller	Electrical Engineering
SuzanneE. Mohney	MaterialsScience and Engineering
JerzyRuzyllo	Electrical Engineering
NitinSamarth	Physics
ChristopherR. Wronski	Electrical Engineering
ShizuoYin	Electrical Engineering

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EMPRL Staff

Director:	StephenJ. Fonash
Associate Director, MicroFab:	DavidL. Miller (814) 865-2730    dlm15@psu.edu
Associate Director, NanoFab:	RobertJ. Davis
Facilities Manager:	H. David Sarge    (814) 865-0870    hdsesm@engr.psu.edu
Staff Assistant (MicroFab):	Fawn Houtz    (814) 865-0870    flhesm@engr.psu.edu

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emailus at: dlm15@psu.edu