BioRad Electrolytic Profiler
A commercial system used to make doping density measurements deep into epitaxial layers. Grad student Weizhong Cai is the operator.
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BioRad Electrolytic Profiler
A commercial system used to make doping density measurements deep into
epitaxial layers. Grad student Weizhong Cai is the operator.
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Perturbed Angular Correlation Spectroscopy
Perturbed angular correlation spectroscopy is a nuclear hyperfine technique
used by Dr. Miller's group and Dr. Catchen to determine adsorption sites
of In on III-V surfaces. This home-made MBE system is attached to the
GenII MBE by a UHV transfer tube, and is also used to grow III-V epitaxial
layers.
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Varian GenII Molecular Beam Epitaxy system
The Varian GenII MBE system was installed in the EEW facility in 1989,
and is operated, maintained and supported by Prof. Miller's research group.
It has a 3" substrate capability and can grow Al, In, and Ga arsenides.
Carbon tetrabromide doping and iodine injection are also available. A
second growth chamber (out of the photo to the left) is attached through
a vacuum transport tube, and contains a perturbed angular correlation spectroscopy
capability and is also used to grow other III-V compounds.
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MBE substrate preparation hood
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