Lithography Laboratory  


Headway photoresist spinner and photoresist bench
return to top of this page


Resist processing and developing hood
return to top of this page


Headway LM22 large substrate spin-coater
return to top of this page


Karl Suss mask aligner
return to top of this page


Headway photoresist spinner and bake hotplates
return to top of this page


Nikon optical inspection microscope
return to top of this page

return to Labs and Equipment page
return to MicroFab homepage