•   Vactronics multichamber PECVD system  (Wronski)
•   Cluster Clean SP200  (Ruzyllo)
•   Remote plasma system  (Ruzyllo)
•   ECR plasma system  (Fonash)
•   Technics MicroPD Series 900 PECVD

 

 

Cluster Clean SP200  (Ruzyllo)
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Remote plasma system  (Ruzyllo)
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ECR plasma system  (Fonash)
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Technics MicroPD Series 900 PECVD
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