| Professor of Electrical Engineering
and Materials Science and Engineering
|
 |
| Professor of Electrical Engineering
and Materials Science and Engineering
|
|
Vitae
Dr. Ruzyllo's research activities are in the area of manufacturing methods and devices for semiconductor micro- and nanoelectronics and photonics as well as processing and characterization of electronic and photonic materials. His research emphasizes surface modification processes in integrated circuit fabrication, gate dielectric processing in advanced CMOS technology, as well as novel methods of semiconductor, including semiconductor quantum dots, and dielectric thin film formation. Recently, Dr. Ruzyllo has become active in the area of semiconductor quantum dot processing for LEDs and optical interconnects. He is also involved in the development of methods of surface characterization for in-line, real time monitoring of semiconductor manufacturing processes.
Dr. Ruzyllo participated and continues to participate in numerous national and international committees as well as advisory, editorial, and technical boards. In1989 he co-initiated, and since then serves as a co-chairman and co-editor of proceedings, the biannual International Symposium on Wafer Cleaning Technology in Semiconductor Device Manufacturing organized under the auspices of the Electrochemical Society. He is involved in several other activities of the Society most recently as a Chairman of the Electronics and Photonics Division. Dr. Ruzyllo authored and co-authored close to 300 papers and conference presentations, several book chapters, a book “Semiconductor Glossary” , and six patents. He created and operates several internet sites devoted to semiconductor science and engineering.
Dr. Ruzyllo joined the Department of Electrical Engineering at Penn State University in 1984 after serving on the faculty of the Warsaw University of Technology, Poland, where he also obtained his Ph.D. He currently holds a joint appointment with the Department of Materials Science and Engineering at Penn State . In 2003 he received a honorary title of Professor in his native Poland . As a graduate student Dr. Ruzyllo spent two years at the Tohoku University , Sendai , Japan . During the Fall 97 semester he was a Visiting Professor at the Interuniversity Microelectronics Center (IMEC) in Leuven .
Dr. Ruzyllo is a Fellow of IEEE and a Fellow of the Electrochemical Society.