Demonstration Models using Microelectromechanical Devices

(Faculty Mentor: Srinivas Tadigadapa)

 

Microelectromechanical devices and systems (MEMS) is an actively pursued area of research in the EE Department by Professor Srinivas Tadigadapa. Microelectromechanical devices perform mechanical and often other (integrated) functions; such as electronic, electromechanical, chemical, optical, thermal, and magnetic. Current projects include MEMS switches for RF applications, MEMS accelerometers for industrial applications and several biological MEMS devices. Research projects are aimed towards looking into improving device performances and investigation into new phenomena in these microscale devices. Thus opportunities exist for the training and exposing junior to senior level students to this exciting field of research. Typical projects can include a well-defined study of the mechanical, thermal or electrical performance of fabricated MEMS test structures. These could be used to evaluate and compare the material properties of thin film materials with their bulk properties. Another exciting area for undergraduate level projects includes creating demonstration models using the MEMS actuators. For example, using a simple He/Ne laser, the tiny motion of a MEMS piezoelectric cantilever can be amplified and demonstrated macroscopically i.e., to the naked eye without the use of a microscope. Such a precision set-up can also be used to measure the actual deflection if the magnification of the optical set-up is exactly known. Creating demonstrator models requires the creative use of simple electronics, optics and other engineering skills acquired as part of the any standard engineering curriculum. The creation of such models will provide the student an opportunity to reinforce such engineering skills and will expose them to cutting edge MEMS research. The scope and difficulty level of the projects will be kept such that the selected student with the help of a graduate research assistant and the professor will be able to create practical models over the 10 week period of time.