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Solid State Device Technology Lab

The Solid State Device Technology Lab is a "clean room" used in EE 441 -- Solid State Device Technology.

This lab contains the following test equiment:
  • MRL712D Oxidation/diffusion Furnaces
  • IC Processing Wet Chemistry Benches
  • Headway Photoresist Application
  • Kasper 2001 Photolithography
  • Rudolph Research Ellipsometer
  • VEECO Four-point Probe System
  • VEECO Vacuum Evaporation System
  • Wafer Inspection Microscopes
  • HP 4155A/4145B Semiconductor Parameter Analyzers
  • Micromanipulator IC Probe Stations
  • Tektronix TDS 640A Oscilloscope
   










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